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Kinematic Modeling and Analysis of a Planar Micropositioner

By Dagalakis, Nicholas G.

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Book Id: WPLBN0000681739
Format Type: PDF eBook
File Size: 264.50 KB.
Reproduction Date: 2005
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Title: Kinematic Modeling and Analysis of a Planar Micropositioner  
Author: Dagalakis, Nicholas G.
Language: English
Subject: Technology., Reference materials, Technology and literature
Collections: Techonology eBook Collection
Publication Date:


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Dagalakis, N. G. (n.d.). Kinematic Modeling and Analysis of a Planar Micropositioner. Retrieved from

Technical Reference Publication

Introduction: The tremendous growth of opto-electronic devices manufacturing has raised the need for high performance micro-positioners, which are used in their assembly and alignment. The static and dynamic performance of micro-positioners depends in part on the quality of operation of their controllers, which in turn depends to a significant degree on the accuracy of the kinematic and dynamic mathematical models upon which they are based. The objective of this work was to evaluate the accuracy of two kinematic mathematical models of a planar X-Y micro-positioner under a variety of testing conditions.


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